Study on MEMS Thermal Microactuators with Pedestal‐Type Beam Shape and Au Electroplating

Abstract

Recently, microfluid systems have been extensively studied, and microactuators such as microvalves fabricated by microelectromechanical systems technology are essential for realizing these systems. In this paper, thermal microactuators of trapezoidal shape fabricated by SOIMUMPs technology with and without Au electroplating layers are studied to obtain larger displacement.