Study on surface topography of IBS oxide multilayer mirrors

Abstract

The surface topography of oxide multilayer mirrors with Ion Beam Sputtering (IBS) technology is experimentally investigated by Atomic Force Microscope (AFM). Different film materials, substrates polishing and cleaning methods are experimented for promoting the mirrors quality, respectively. PSD (Power Spectral Density) characteristic of different substrates and films has been compared. Surface roughness with different polished methods has been analyzed too. The result shows that the depositional property of film materials determines the principal characteristic of mirror surface topography, and the substrate polishing and cleaning quality mostly affects the mirror optical quality.