Abstract:The design, manufacturing, and systematic parametric evaluation of a modified glow discharge ion source (with a pear-shaped anode and a plane cathode) are detailed to extract low-power, high plasma density, and high-intensity ion beam current for material processing. The study includes determining the optimal operative conditions for ion source performance and optimizing its properties. The ion beam current was measured at various argon gas pressures and anode-cathode distances as well as its measurements at v… Show more
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