2019
DOI: 10.1016/j.matchemphys.2019.03.024
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Studying the effects of plasma produced species on the optical characteristics and bonding structure of diamond-like carbon films deposited by direct current unbalanced magnetron sputtering

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Cited by 11 publications
(1 citation statement)
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“…A slightly decreased I D / I G ratio means an increase in sp 3 content, and this trend implies that the films become more diamond-like (i.e., less sp 2 content). In addition, many studies have shown that H α and CH contents are increased in high-energy plasma environments, thereby enhancing the formation of hydrogen bonds in the film structures to help form more stable sp 3 bonds, which again indicates that the advantages of plasma-assisted carburizing technology to prepare DLC films. …”
Section: Resultsmentioning
confidence: 99%
“…A slightly decreased I D / I G ratio means an increase in sp 3 content, and this trend implies that the films become more diamond-like (i.e., less sp 2 content). In addition, many studies have shown that H α and CH contents are increased in high-energy plasma environments, thereby enhancing the formation of hydrogen bonds in the film structures to help form more stable sp 3 bonds, which again indicates that the advantages of plasma-assisted carburizing technology to prepare DLC films. …”
Section: Resultsmentioning
confidence: 99%