Sub-diffraction limited direct diode laser patterning of methacrylic polymer thin films doped with silver nanoparticles

Abstract

High quality poly(methyl methacrylate) (PMMA) thin nanocomposite films doped with different concentration of silver (Ag) nanoparticles are demonstrated. SEM and TEM confirmed the presence of Ag-PMMA nanocomposites with excellent dispersion of Ag nanoparticles into the PMMA matrix and nanoparticles with an average size of 9 nm. By using a direct Laser writing system with a continuous wave 405 nm diode Laser source the films were exposed, allowing the formation of hole-like or linear patterns in the sub 200nm regime, using a 280nm FWHM sized laser spot, demonstrating, for the first time, the potential for sub-diffraction limit laser processing in such 2-material composite systems.