2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3m-Nano) 2017
DOI: 10.1109/3m-nano.2017.8286286
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Sub-pixel vision-based inspection and control of a flexure micropositioner

Sifeng He
1
,
Hui Tang
2
,
Kaifu Zhang
3
et al.
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