Substrate bias effects during diamond like carbon film deposition by microwave ECR plasma CVD

Dey, R.; Singh, Shyam; Biswas, A.; Tokas, R.B.; Chand, Naresh; Venkateshwaran, Selvaraj; Bhattacharya, Debarati; Sahoo, N. K.; Gosavi, Suresh; Kulkarni, Sunil Jayant; Patil, Dhairyasheel

doi:10.1016/j.cap.2007.03.010

Cited by 25 publications

(6 citation statements)

References 12 publications

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“…The deconvolution of this peak allows quantifying the relative sp 2 and sp 3 bindings amount due to a slight difference in binding energy levels. [11,20,21]. Insuring a very low energy levels shift (less than 1%) between all our samples, we quantify sp 2 and sp 3 contribution values with a very good precision ( ± 0.5%).…”

Section: Characterization Techniquesmentioning

confidence: 83%

“…Sp 2 is the stable binding corresponding to graphitic material whereas the sp 3 is the metastable binding related to the adamant character which is formed under special conditions of temperature and pressure. The amount of each carbon hybridisation and correlated properties are directly related to the process used to elaborate DLC [9][10][11]. Another important property that DLC share with diamond is a high visible and infrared range transparency.…”

Section: Introductionmentioning

confidence: 99%

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UV laser annealing of Diamond-Like Carbon layers obtained by Pulsed Laser Deposition for optical and photovoltaic applications

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Antoni

Diebold

et al. 2019

Applied Surface Science

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Section: Characterization Techniquesmentioning

confidence: 83%

Section: Introductionmentioning

confidence: 99%

UV laser annealing of Diamond-Like Carbon layers obtained by Pulsed Laser Deposition for optical and photovoltaic applications

Stock

Antoni

Diebold

et al. 2019

Applied Surface Science

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“…4(a) shows the survey scan spectrum of the Ag/CNT hybrids, which shows strong signals of silver, carbon, and a small peak of oxygen. The C signal with a binding energy of 284.5 eV is from the CNTs and corresponds to the C 1s core level spectrum [22,23]. Fig.…”

Section: Resultsmentioning

confidence: 99%

Room temperature hydrogen uptake of carbon nanotubes promoted by silver metal catalyst

Rather

Naik

Hwang

et al. 2009

Journal of Alloys and Compounds

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“…The ion energy plays a crucial role in thin film deposition, and Sun et al 52 have suggested that 30-300 eV ion energy is beneficial for good quality DLC films. While the several research groups [53][54][55][56][57][58][59] have observed that the DLC films deposited at À100 V self-bias or with 100 eV ion energy (as 1 eV corresponds to 1 V) have the more diamond like properties. They suggested that the properties of the DLC films deteriorate above this energy values (100 eV) and transformation of diamond-like (highly sp 3 hybridized) to graphite-like (having high sp 2 content) properties takes place due to ionic bombardment which favors sputtering/etching or bond breaking process at the film surface.…”

Section: Correlation Of Experimental Plasma Parameters With the Rementioning

confidence: 99%

Investigation of radio frequency plasma for the growth of diamond like carbon films

et al. 2012

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Growth mechanisms of ZnO(0001) investigated using the first-principles calculation J. Appl. Phys. 112, 064301 (2012) Generation of silver-anatase nanocomposite by excimer laser-assisted processing AIP Advances 2, 032171 (2012) Degradation and passivation of CuInSe2The radio frequency has been used to generate plasma of argon, acetylene gases, and their mixture should be replaced by mixture in a plasma enhanced chemical vapor deposition system. The generated plasma discharge has been characterized by an impedance analyzer (VI probe) for the evaluation of various electrical parameters of the plasma discharge such as rf-voltage, rf-current, phase, impedance, and actual power consumed by the plasma discharge. These plasma parameters have been analyzed as a function of self-bias, which are found to depend on applied power, pressure, and reactor geometry of the system. Subsequently, same plasma conditions were used for the deposition of diamond like carbon (DLC) films. The argon plasma has lowest impedance (16.02 X) value and highest average electron density (2.77 Â 10 10 cm À3 ) value at À150 V self-bias. X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy measurements have been performed on the prepared DLC films for the evaluation of the chemical bonding. XPS studies have been used for the evaluation of sp 3 and sp 2 contents. The film deposited at À150 V self-bias has the highest values of sp 3 content (60.97 at. %), band gap, nanohardness, elastic modulus, plastic index parameter, and elastic recovery, and the lowest value of sp 2 content (27.27 at. %) among the films chosen for the present investigation. These DLC films properties were found to be well correlating with the evaluated plasma parameters. V C 2012 American Institute of Physics. [http://dx.

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Substrate bias effects during diamond like carbon film deposition by microwave ECR plasma CVD

Cited by 25 publications

References 12 publications

UV laser annealing of Diamond-Like Carbon layers obtained by Pulsed Laser Deposition for optical and photovoltaic applications

UV laser annealing of Diamond-Like Carbon layers obtained by Pulsed Laser Deposition for optical and photovoltaic applications

Room temperature hydrogen uptake of carbon nanotubes promoted by silver metal catalyst

Investigation of radio frequency plasma for the growth of diamond like carbon films

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