2012
DOI: 10.1364/oe.20.013551
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Subsurface damage distribution characterization of ground surfaces using Abbott–Firestone curves

Abstract: Measurement of subsurface damage (SSD) induced by grinding process is of major interest in the development of high laser damage fused silica optical components manufacturing processes. Most SSD measurements methods give only access to the peak to peak value. We herein report on the benefit of using Abbott-Firestone curves to get an insight of the SSD distribution inside the optical material. We evidence on various diamond wheel ground fused silica substrates that such an approach is complementary to a classica… Show more

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Cited by 28 publications
(9 citation statements)
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“…However, S a1 and S a2 give the area of peaks and valleys as shown from the scanned area. These parameters are also used for the study of SSD and surface by some researchers [22,36,37].…”
Section: Experimentationmentioning
confidence: 99%
“…However, S a1 and S a2 give the area of peaks and valleys as shown from the scanned area. These parameters are also used for the study of SSD and surface by some researchers [22,36,37].…”
Section: Experimentationmentioning
confidence: 99%
“…The authors studied and compared surfaces that differed in microgeometry but had the same roughness. The Abbott-Firestone curve [22][23][24][25] and R k parameter have become widely used to evaluate the relationship between machine parts' performance properties and surface roughness. Peculiarities of estimating the surface condition using the Abbott-Firestone curve were described in [26,27].…”
Section: Introductionmentioning
confidence: 99%
“…So the optical performance is highly dependent on the surface quality and the degree of surface/subsurface damage. Manufacturing steps of optical component, from grinding to polishing, are known to be major contributors to the generation of such mechanical defects [5]. During grinding step, although diamond wheel grinding has used widely, some surface/subsurface damages generated during grinding are difficult to remove in a subsequent polishing operation.…”
Section: Introductionmentioning
confidence: 99%