2024
DOI: 10.1088/1361-6668/ad50af
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Superconducting single-photon detector integrated in DBR with optical microconnector for MM or SM fiber

M V Shibalov,
I M Asharchuk,
E O Epifanov
et al.

Abstract: This paper presents the development of a superconducting nanowire single-photon detector (SNSPD) integrated into a distributed Bragg reflector (DBR) with a design center wavelength of 830 nm and a width of 200 nm. This SNSPD is made of a superconducting niobium nitride (NbN) thin film that is produced using plasma-enhanced atomic layer deposition (PEALD). The DBR is made of 15 alternating layers of silicon nitride and silicon oxide that are produced through plasma-enhanced chemical vapor deposition (PECVD). Th… Show more

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