Superconducting Tunable Microstrip Gap Resonators Using Low Stress RF MEMS Fabrication Process

Benoit, Robert R.; Barker, N. Scott

doi:10.1109/jeds.2017.2706676

Cited by 3 publications

(2 citation statements)

References 19 publications

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“…The mechanical and electrical design of the RF-MEMS switches has been comprehensively studied in the literature [19], and it highly depends on the circuit or transmission media in which it is to be integrated and the technology platform [20]. A number of solutions can be found, including integration in microstrip transmission lines [21], coplanar waveguides (CPWs) [4], coplanar striplines (CPSs) and slotlines [11], planar structures embedded in rectangular waveguides [22], and micromachined waveguides for sub-mm-wave frequencies [23].…”

Section: Introductionmentioning

confidence: 99%

RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits

Pradell¹,

Girbau²,

Ribó³

et al. 2018

MEMS Sensors - Design and Application

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Radio frequency microelectromechanical system (RF-MEMS) switches have demonstrated superior electrical performance (lower loss and higher isolation) compared to semiconductor-based devices to implement reconfigurable microwave and millimeter (mm)-wave circuits. In this chapter, electrostatically actuated RF-MEMS switch configurations that can be easily integrated in uniplanar circuits are presented. The design procedure and fabrication process of RF-MEMS switch topologies able to control the propagating modes of multimodal uniplanar structures (those based on a combination of coplanar waveguide (CPW), coplanar stripline (CPS), and slotline) will be described in detail. Generalized electrical (multimodal) and mechanical models will be presented and applied to the switch design and simulation. The switch-simulated results are compared to measurements, confirming the expected performances. Using an integrated RF-MEMS surface micromachining process, high-performance multimodal reconfigurable circuits, such as phase switches and filters, are developed with the proposed switch configurations. The design and optimization of these circuits are discussed and the simulated results compared to measurements.

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Section: Introductionmentioning

confidence: 99%

RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits

Pradell¹,

Girbau²,

Ribó³

et al. 2018

MEMS Sensors - Design and Application

View full text Add to dashboard Cite

show abstract

Section: Introductionmentioning

confidence: 99%

MEMS Sensors - Design and Application

Yellampalli¹

2018

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Radio frequency microelectromechanical system (RF-MEMS) switches have demonstrated superior electrical performance (lower loss and higher isolation) compared to semiconductor-based devices to implement reconigurable microwave and millimeter (mm)-wave circuits. In this chapter, electrostatically actuated RF-MEMS switch conigurations that can be easily integrated in uniplanar circuits are presented. The design procedure and fabrication process of RF-MEMS switch topologies able to control the propagating modes of multimodal uniplanar structures (those based on a combination of coplanar waveguide (CPW), coplanar stripline (CPS), and slotline) will be described in detail. Generalized electrical (multimodal) and mechanical models will be presented and applied to the switch design and simulation. The switch-simulated results are compared to measurements, conirming the expected performances. Using an integrated RF-MEMS surface micromachining process, high-performance multimodal reconigurable circuits, such as phase switches and ilters, are developed with the proposed switch conigurations. The design and optimization of these circuits are discussed and the simulated results compared to measurements.

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Reconfigurable THz metamaterial based on microelectromechanical cantilever switches with a dimpled tip

Huang¹,

Okatani²,

Inomata³

et al. 2023

Opt. Express

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We numerically and experimentally proposed a reconfigurable THz metamaterial (MM) by employing microelectromechanical cantilevers into a ladder-shaped MM (LS-MM). A fixed-free cantilever array with a dimpled tip behaved as Ohmic switches to reshape the LS-MM so as to actively regular the transmission response of THz waves. The cantilever tip was designed to be a concave dimple to improve the operational life without sacrificing the mechanical resonant frequency (fmr), and a fmr of 635 kHz was demonstrated. The device actively achieved a 115-GHz change in transmittance resonant frequency and a 1.82-rad difference in transmission phase shift, which can practically benefit advancing THz applications such as fast THz imaging and 6 G communications.

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Superconducting Tunable Microstrip Gap Resonators Using Low Stress RF MEMS Fabrication Process

Cited by 3 publications

References 19 publications

RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits

RF-MEMS Switches Designed for High-Performance Uniplanar Microwave and mm-Wave Circuits

MEMS Sensors - Design and Application

Reconfigurable THz metamaterial based on microelectromechanical cantilever switches with a dimpled tip

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