Abstract:When a micro cantilever with a nano-scale tip is manipulated on a substrate with atomic-scale roughness, the periodic lateral frictional force and stochastic fluctuations may induce stick-slip motion of the cantilever tip, which greatly decreases the precision of the nano manipulation. This unwanted motion cannot be reduced by open-loop control especially when there exist parameter uncertainties in the system model, and thus needs to introduce feedback control. However, real-time feedback cannot be realized by… Show more
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