2016
DOI: 10.1088/1674-4926/37/2/021001
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Surface acoustic wave devices for sensor applications

Abstract: Surface acoustic wave (SAW) devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressur… Show more

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Cited by 161 publications
(78 citation statements)
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“…The SAW, which was first described by Lord Rayleigh, refers to the propagation of an acoustic wave along the surface of a piezoelectric material [124]. However, SAW devices could not play an important role in practical applications until White and Voltmer proposed a technique to generate a SAW using interdigital transducers (IDTs) [125] fabricated on the surface of a piezoelectric material.…”
Section: Surface Acoustic Wave (Saw)-based Biosensormentioning
confidence: 99%
“…The SAW, which was first described by Lord Rayleigh, refers to the propagation of an acoustic wave along the surface of a piezoelectric material [124]. However, SAW devices could not play an important role in practical applications until White and Voltmer proposed a technique to generate a SAW using interdigital transducers (IDTs) [125] fabricated on the surface of a piezoelectric material.…”
Section: Surface Acoustic Wave (Saw)-based Biosensormentioning
confidence: 99%
“…These provide the advantage of small size due to slower wave velocity at radio frequency (RF) ranges relative to electromagnetic waves, and high efficiency due to reduction of resistive losses compared with similar purely electronic devices. They are compatible with existing integrated circuit (IC) fabrication techniques and can be integrated with other circuit elements [3]. However, as first stated by Helmholtz in 1859 and proved by Rayleigh in 1878, the propagation of acoustic waves in conventional linear media is reciprocal [4]; which is 'requiring the transmission of information or energy between any two points in space to be symmetric for opposite propagating directions' [5].…”
Section: Introductionmentioning
confidence: 99%
“…To solve this problem, we focused on a solution agitation technology using surface acoustic waves (SAWs) as an actuator . A SAW is a wave in which the energy is concentrated and propagated on the surface of an elastic body.…”
Section: Introductionmentioning
confidence: 99%
“…To solve this problem, we focused on a solution agitation technology using surface acoustic waves (SAWs) as an actuator. [9][10][11] 12,13 In our previous study, we proposed a highly sensitive electrochemical system by combining solution agitation using SAW and the electrochemical detection system μTAS.…”
mentioning
confidence: 99%