1994
DOI: 10.1116/1.579021
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Surface cleaning with the carbon dioxide snow jet

Abstract: Surface cleaning using a carbon dioxide snow jet incorporates a high-velocity stream of small dry ice particles and gas which is directed towards a contaminated surface. The resulting interactions between the snow particles and surface contamination lead to particulate and hydrocarbon removal. Past work has demonstrated removal of micron and submicron particles and also hydrocarbon and silicone-based stains from many different samples including Si, GaAs, InP wafers, metals, ceramics, UHV components, glass, opt… Show more

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Cited by 105 publications
(66 citation statements)
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“…Before coating, type B substrates, cut in ca. 1 cm 2 pieces, were freed from Si dust by treatment with a CO 2 -jet [13]. The samples were then 'degreased' by sonication in ethanol, acetone and toluene.…”
Section: Dept Of Applied Physics University Of Ulm D-89069 Ulm Gementioning
confidence: 99%
“…Before coating, type B substrates, cut in ca. 1 cm 2 pieces, were freed from Si dust by treatment with a CO 2 -jet [13]. The samples were then 'degreased' by sonication in ethanol, acetone and toluene.…”
Section: Dept Of Applied Physics University Of Ulm D-89069 Ulm Gementioning
confidence: 99%
“…A combination of the excellent solvent properties of CO 2 , its low temperature and the momentum imparted by the crystals facilitates the cleaning. 22 Until now, the process has been used purely as a cleaning technique, principally on flat silicon surfaces where it has widespread industrial use in the silicon electronics industry. Here, we extend and study its use for cleaning nanostructured SERS substrates and as a tool for inducing transient perturbations to the SERS process allowing us to track short-term changes to the strength of the SERS signal and background.…”
Section: Introductionmentioning
confidence: 99%
“…Liquid CO 2 also has good solvent properties, meaning it can effectively remove hydrocarbons from the surface. This method has the advantages that it doesn't cause any damage to the surface and is residue free [23,24].…”
Section: Jet Methodsmentioning
confidence: 99%