a b s t r a c tThe properties of CoFe 2 O 4 /BaTiO 3 artificial multiferroic multilayers strongly depend on the crystalline structure, the stoichiometry and the cation distribution between octahedral (Oh) and tetrahedral (Td) sites (inversion factor). In the present study, we have investigated epitaxial CoFe 2 O 4 layers grown on BaTiO 3 , with different Co/Fe ratios. We determined the cation distribution in our samples by X-ray magnetic circular dichroism (XMCD), a well accepted method to do so, and by X-ray photoelectron spectroscopy (XPS), using a fitting method based on physical considerations. We observed that our XPS approach converged on results consistent with XMCD measurements made on the same samples. Thus, within a careful decomposition based on individual chemical environments it is shown that XPS is fully able to determine the actual inversion factor.