2012
DOI: 10.1063/1.4768469
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Surface composition of BaTiO3/SrTiO3(001) films grown by atomic oxygen plasma assisted molecular beam epitaxy

Abstract: International audienceWe have investigated the growth of BaTiO3 thin films deposited on pure and 1% Nb-doped SrTiO3(001) single crystals using atomic oxygen assisted molecular beam epitaxy and dedicated Ba and Ti Knudsen cells. Thicknesses up to 30nm were investigated for various layer compositions. We demonstrate 2D growth and epitaxial single crystalline BaTiO3 layers up to 10nm before additional 3D features appear; lattice parameter relaxation occurs during the first few nanometers and is completed at simil… Show more

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Cited by 30 publications
(46 citation statements)
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“…All three substrates were annealed in air at 900 • C for 3 h a few weeks before deposition in order to restore the nominal stoichiometry and get rid of the polishing induced defects. We first performed the epitaxial growth of BaTiO 3 (0 0 1) on SrTiO 3 (0 0 1) in the conditions detailed in [14]. Ba and Ti were deposited from individual Knudsen cells.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…All three substrates were annealed in air at 900 • C for 3 h a few weeks before deposition in order to restore the nominal stoichiometry and get rid of the polishing induced defects. We first performed the epitaxial growth of BaTiO 3 (0 0 1) on SrTiO 3 (0 0 1) in the conditions detailed in [14]. Ba and Ti were deposited from individual Knudsen cells.…”
Section: Methodsmentioning
confidence: 99%
“…Three samples of CoFe 2 O 4 /BaTiO 3 /SrTiO 3 (0 0 1) were prepared by Atomic-Oxygen assisted Molecular Beam Epitaxy (AO-MBE) [14][15][16].…”
Section: Methodsmentioning
confidence: 99%
“…1(e), this extra streak disappears during the background-subtracted line scan taken during one unit cell of BTO deposition (120 s), indicating stoichiometric BTO. For Ba-rich samples, BaO x particles can nucleate at the surface of the as-grown film [11]. As indicated by AFM, soaking in water [12,13] at room temperature for 4 h reduces the RMS roughness from 0.763 nm ( Fig.…”
Section: Methodsmentioning
confidence: 98%
“…The BaTiO 3 epitaxial layers were deposited on single crystalline 1 at.% Nb:SrTiO 3 (001) (i.e.~0.5 wt% Nb) substrates using atomic oxygen assisted molecular beam epitaxy (AO-MBE), a technique that makes possible the deposition of single crystalline layers of controlled morphology, stoichiometry and thickness [21]. The doped substrate is conductive enough to use it as electrode during the BaTiO 3 overlayer poling procedures.…”
Section: Methodsmentioning
confidence: 99%