Surface Imaging Resists for 193 nm Lithography

Johnson, Donald W.; Hartney, Mark A.

doi:10.1143/jjap.31.4321

Cited by 26 publications

(20 citation statements)

References 6 publications

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“…Results for Ϫ ϭ15 GPa are shown in Fig. 2͑b͒, and 11 This comparison shows that for moderate shocks with stress amplitude less than 20 GPa, the present simplified constitutive framework provides quite good information concerning the shock kinematics. Even for much stronger shocks up to 100 GPa, the model predictions remain acceptable.…”

Section: Comparison With Experimentsmentioning

confidence: 83%

“…Model predictions are compared to the experimental data of Johnson and Barker. 11 The good agreement that is evident is due to the appropriate choice of the parameters (M ,T 1 *) controlling the viscous flow. A method to determine these parameters from the shock wave experimental data will be discussed in Sec.…”

Section: B Shock Structurementioning

confidence: 93%

“…The linear dependence is in agreement with experiments and the predicted slope Sϭ1.347 is close to the value Sϭ1.337 obtained by Swegle and Grady 16 from the experimental data of Johnson and Barker. 11 The Eulerian value of the shock velocity is given by, ͑see for instance Swegle and Grady 16 …”

Section: Comparison With Experimentsmentioning

confidence: 99%

“…Steady wave shocks have been first analyzed in Newtonian fluids by Rayleigh 3 and Taylor, 4 and in viscoelastic solids by Band, 5 Band and Duvall, 6 and Bland. 7 In solids, the role of viscous like effects on the shock structure ͑or profile͒ has been experimentally identified in the 1960s by Barker, 8 Mineev and Savinov, 9 Mineev and Zaidel, 10 Johnson and Barker, 11 Manvi et al; 12 see also Swan et al, 13 Prieto and Renero, 14 and the summary on this subject by Godounov et al 15 Plastic shock structures have been analyzed, with the perspective of understanding how shock profiles are affected by the material viscous response. In particular, Johnson and Barker 11 and Swegle and Grady 16 have analyzed experimental recordings where the particle velocity at the rear of the plastic shock is reported in terms of time.…”

Section: Introductionmentioning

confidence: 99%

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Fundamental structure of steady plastic shock waves in metals

Molinari¹,

Ravichandran

2004

Journal of Applied Physics

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The propagation of steady plane shock waves in metallic materials is considered. Following the constitutive framework adopted by R. J. Clifton ͓Shock Waves and the Mechanical Properties of Solids, edited by J. J. Burke and V. Weiss ͑Syracuse University Press, Syracuse, N.Y., 1971͒, p. 73͔ for analyzing elastic-plastic transient waves, an analytical solution of the steady state propagation of plastic shocks is proposed. The problem is formulated in a Lagrangian setting appropriate for large deformations. The material response is characterized by a quasistatic tensile ͑compression͒ test ͑providing the isothermal strain hardening law͒. In addition the elastic response is determined up to second order elastic constants by ultrasonic measurements. Based on this simple information, it is shown that the shock kinetics can be quite well described for moderate shocks in aluminum with stress amplitude up to 10 GPa. Under the later assumption, the elastic response is assumed to be isentropic, and thermomechanical coupling is neglected. The model material considered here is aluminum, but the analysis is general and can be applied to any viscoplastic material subjected to moderate amplitude shocks. Comparisons with experimental data are made for the shock velocity, the particle velocity and the shock structure. The shock structure is obtained by quadrature of a first order differential equation, which provides analytical results under certain simplifying assumptions. The effects of material parameters and loading conditions on the shock kinetics and shock structure are discussed. The shock width is characterized by assuming an overstress formulation for the viscoplastic response. The effects on the shock structure of strain rate sensitivity are analyzed and the rationale for the J. W. Swegle and D. E. Grady ͓J. Appl. Phys. 58, 692 ͑1985͔͒ universal scaling law for homogeneous materials is explored. Finally, the ability to deduce information on the viscoplastic response of materials subjected to very high strain rates from shock wave experiments is discussed.

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Section: Comparison With Experimentsmentioning

confidence: 83%

Section: B Shock Structurementioning

confidence: 93%

Section: Comparison With Experimentsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Fundamental structure of steady plastic shock waves in metals

Molinari¹,

Ravichandran

2004

Journal of Applied Physics

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“…Previous work on thick aluminum samples, on the order of centimeter and larger, showed small elastic stress amplitudes of ϳ0.1 GPa and little elastic attenuation. [1][2][3][4] Based on these measurements, aluminum was considered to have a rateindependent elastic stress as a function of thickness.…”

Section: Introductionmentioning

confidence: 99%

The elastic-plastic response of aluminum films to ultrafast laser-generated shocks

Whitley

McGrane

Eakins

et al. 2011

Journal of Applied Physics

140

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We present the free surface response of 2, 5, and 8 m aluminum films to shocks generated from chirped ultrafast lasers. We find two distinct steps to the measured free surface velocity that indicate a separation of the faster elastic wave from the slower plastic wave. We resolve the separation of the two waves to times as short as 20 ps. We measured peak elastic free surface velocities as high as 1.4 km/s corresponding to elastic stresses of 12 GPa. The elastic waves rapidly decay with increasing sample thickness. The magnitude of both the elastic wave and the plastic wave and the temporal separation between them was strongly dependent on the incident laser drive energy.

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193 nm resists and lithography

Kunz

Allen

Hartney

et al. 1994

Polymers for Advanced Techs

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A review of recent efforts to develop photoresist materials and processes for 193 nm (ArF excimer laser) photolithography is reported. Three categories of resist processes are discussed: (1) conventional single layer, (2) bilayer and (3) surface‐imaged resist processes. To date, materials have been developed for each process which exhibit resolution to less than 0.25 μm with sensitivities of less than 50 mJ/cm2.

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Surface Imaging Resists for 193 nm Lithography

Cited by 26 publications

References 6 publications

Fundamental structure of steady plastic shock waves in metals

Fundamental structure of steady plastic shock waves in metals

The elastic-plastic response of aluminum films to ultrafast laser-generated shocks

193 nm resists and lithography

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