Surface Modification of Fluorocarbon Polymers by Synchrotron Radiation

Polytetrafluoroethylene processing characteristics using high-energy X-ray

“…4. As shown in the figure, the processing rate increases with the substrate temperature and this agrees with previously reported results (Kanda et al 2003;Zhang and Katoh 1996;Katoh and Zhang 1998). First of all, we assume that the high-energy induced PTFE decomposition and desorption photochemistry is the same as previously reported cases.…”

“…We used an exposure chamber with five-motion stage for fabrication of quasi three-dimensional (3D) microstructures and for large-area patterning at the end of the beamline. It has been reported that the pattern quality and processing rate is improved and there is also effects of surface modification from the hydrophilic to hydrophobic region by heating the PTFE substrate during X-ray exposure (Kanda et al 2003;Zhang and Katoh 1996;Katoh and Zhang 1998). To investigate thermal induced effects during high-energy X-ray exposure, a large-area hotplate was mounted onto the stage and PTFE substrates.…”

“…The advantages of PTFE microfabrication using this process likely to lead various and great benefits for MEMS, lab on a chip, and other microdevices. Moreover several examples of high-aspect ratio PTFE microfabrication and surface modification using soft X-ray have been proposed (Zhang et al 1995;Kanda et al 2003). High-aspect ratio microstructure processing was conducted in the photonenergy region of 0.5-4 keV, while for lower 1.0 keV white light, the surface of PTFE substrate were modified from hydrophilic to ultrahydrophobic, while a high-aspect ratio structure was not formed (Zhang et al 1995;Kanda et al 2003).…”

“…Moreover several examples of high-aspect ratio PTFE microfabrication and surface modification using soft X-ray have been proposed (Zhang et al 1995;Kanda et al 2003). High-aspect ratio microstructure processing was conducted in the photonenergy region of 0.5-4 keV, while for lower 1.0 keV white light, the surface of PTFE substrate were modified from hydrophilic to ultrahydrophobic, while a high-aspect ratio structure was not formed (Zhang et al 1995;Kanda et al 2003). Although advantages of photo ablation process using soft X-ray were shown in previous works the PTFE decomposition and desorption photochemistry have not been fully understood.…”

Modification Processes for Highly Hydrogenated Diamond-Like Carbon Thin Films by Soft X-ray Irradiation

“…(14) The experimental apparatuses at BL06 are described in detail in previous reports. (15,16) The SR extracted from a bending magnet, which is the light source of BL06, was introduced to the sample stage as a straight beam via a pair of mirrors. The SR at the BL06 sample stage had a continuous spectrum from infrared to soft X-rays below 1 keV.…”