Lubrication - Tribology, Lubricants and Additives 2018
DOI: 10.5772/intechopen.73141
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Surface Morphology and Tribological Properties of Nanoscale (Ti, Al, Si, C)N Multilayer Coatings Deposited by Reactive Magnetron Sputtering

Abstract: The current topics related to the morphology and tribology of TiAlN monolayer, TiAlN/ SiNx, TiAlN/CNx and TiAlN/CNxAECNx nanoscale multilayer coatings and refer to our recent results on the evaluation of surface morphology, and nanoscale mechanical and tribological properties of coatings deposited on cemented carbide cutting tools and silicon wafer substrates by reactive magnetron sputtering deposition. The surface morphology and microstructure of the coatings were evaluated with an atomic force microscope in … Show more

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