Surface Orientation Effects on SiGe Quantum Dots and Nanorings Formation

Abstract

Surface orientation effects on SiGe quantum dots and nanorings have been investigated in this work. The base shapes of SiGe QDs and nanorings can be controlled by different surface orientation. Moreover, the hydrogen desorption rate is different in three kinds of surface orientation. The surface diffusion, which plays an important role in Ge out-diffusion mechanism, is dominated by the hydrogen desorption rate, and thus the formation rate of SiGe nanorings becomes different.