1998
DOI: 10.1889/1.1833804
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Surface Profiler for 1100mm Flat Panels, Dektak OSP1100 Overhead Scanning Stylus Profiler

Abstract: A generation of large area flat panel stylus profilers is being built using a new approach to positioning and moving the measurement head over the sample. This approach has several advantages to FPD Manufacturers, including reduced footprint, lower measurement noise, and superior positioning repeatability.

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