Acta Phys. Pol. A
 2014
DOI: 10.12693/aphyspola.125.1306
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Surface Properties of Me/Si Structures Prepared by Means of Self-Ion Assisted Deposition

Игорь Серафимович Ташлыков
1
,
P. Żukowski
2
,
Олег Михайлович Михалкович
3
et al.

Abstract: In this paper a composite structure, topography, wettability and nanohardness of a (100) Si surface modied by means of ion-assisted deposition of metal (Me) coatings in conditions of a self-irradiation are discussed.

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