2009
DOI: 10.1063/1.3124651
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Suspending single-wall carbon nanotube thin film infrared bolometers on microchannels

Abstract: Suspended single-wall carbon nanotube (SWCNT) thin film bolometers have been fabricated on microchannels patterned on Si substrates using electron-beam lithography. The much improved bolometric photoresponse is attributed to the reduced thermal link between SWCNT bolometer and substrate, which can be controlled by tuning the width and spacing of the microchannels. The detectivity D∗ up to 4.5×105 cm Hz1/2/W has been obtained at room temperature, which is at least five times better than that of the unsuspended … Show more

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Cited by 85 publications
(126 citation statements)
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“…Wu et al reported a pristine SWCNT thin film IR bolometer with a thickness of ~ 80 nm suspended on parallel Si microchannels developed by electron-beam lithography. [82] The response time of the detector was 40-60 ms with a detectivity of ~ 4.5 × 10 5 cm Hz 1/2 /W at room temperature. This technique makes the scalable microscopic suspension of CNT thin films possible.…”
Section: Bolometers Based On Swcnt Filmsmentioning
confidence: 99%
See 2 more Smart Citations
“…Wu et al reported a pristine SWCNT thin film IR bolometer with a thickness of ~ 80 nm suspended on parallel Si microchannels developed by electron-beam lithography. [82] The response time of the detector was 40-60 ms with a detectivity of ~ 4.5 × 10 5 cm Hz 1/2 /W at room temperature. This technique makes the scalable microscopic suspension of CNT thin films possible.…”
Section: Bolometers Based On Swcnt Filmsmentioning
confidence: 99%
“…[84][85][86][95][96][97] As for the second aspect, the focal point is how to suspend the device efficiently through various techniques. [82,88] During the last decade, CNT-based bolometric detectors have made substantial progress and the performances of these detectors is continuously being improved. [34] In going from SWCNT films to SWCNT-polymer composites, the TCR has been improved from ~0.1%/K to ~10%/K.…”
Section: Cnt Bolometersmentioning
confidence: 99%
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“…[ 15,36 ] Responsivity of the suspended IR sensor on PET was plotted as a function of bias voltage at room temperature and is shown in Figure 4 . It can be seen from the plot that higher responsivity was obtained at higher bias voltage, as expected from a bolometric process, while the maximum R v obtained for the R2R fabricated MWCNT IR sensor on PET was about 40 V/W.…”
Section: Full Paper Full Paper Full Papermentioning
confidence: 99%
“…[ 20 ] Suspending CNTs in air or vacuum has been shown to reduce their thermal link to the environment leading to significant enhancement of the bolometric photoresponse. [ 1,8,[15][16][17][18] …”
mentioning
confidence: 99%