“…Most of the damage produced in the first layer can be eliminated by means of a low-temperature annealing whereas the damage of the buried layer requires higher annealing temperature (Bentini et al, 2004). Examples of this approach are the fabrication of planar and channel waveguides on LiNbO 3 using low-dose, few-MeV lithium (Raj & Kumar, 2010), carbon (Sugliani et al, 2010), fluorine (Jia et al, 2006) and oxygen Liu et al, 2007Liu et al, , 2008aSong et al, 2008;Tan et al, 2008a;Zhao et al, 2011b) ions.…”