Synthesis and Characterization of Multilayer CrN/ZrN Coatings

Features of Investigations of Multilayer Nitride Coatings Based on Cr and Zr

“…Authors [38] observed columnar microstructure of CrN/ZrN coatings deposited on the silicon substrates by dc magnetron sputtering. In the work [36], the coatings obtained by the unbalanced magnetron sputtering on the steel substrate have a columnar structure as well. Photomicrographs of the lateral section of the CrN/ZrN films obtained by the scanning electron microscopy for lower and higher resolutions are represented in Fig.…”

“…X-ray diffraction analysis of the structure and phase composition of CrN/ZrN coatings are carried out in typical works [33,34,36]. Figure 6 represents X-ray diffraction pattern for multilayer CrN/ZrN samples (with different modulation period) as well as single-layer CrN and ZrN film structures.…”

“…Below, we go into details of these works [29][30][31][32][33][34][35][36][37][38][39][40]. We review the structure and properties of the most promising, on our opinion, zirconium-and chromium-nitride-based nanocomposite coatings with different technological conditions during the deposition.…”

“…As well as previous papers, article [36] also deals with physical and mechanical properties of CrN/ZrN films and their connection with tribological features. The samples were synthesized via magnetron sputtering with unbalanced scheme and change of the rotational velocity for substrate carrier, but with the fixed coating conditions.…”

“…Chemical elements were distributed over the depth (profiling) using the Auger spectroscopy. Authors [36] revealed that concentration of N, Cr, and Zr components remains unchanged over the all coating thickness. An average value for atomic composition in the films is of the order of (Cr + + Zr)/N = 1.…”