Synthesis and Structural Characterization of a Novel Magnesium β‐Diketonatoalkoxide Complex: A New Precursor for the MOCVD of MgO

Abstract

The tetrameric magnesium complex [Mg(thd)(m 3 -OMe)(MeOH)] 4 (thd = 2,2,6,6-tetramethylheptane-3,5-dionate), 1, has been synthesized and its structure determined by X-ray crystallography. Thin films of magnesium oxide, MgO, have been deposited by liquid-injection MOCVD using tetrahydrofuran solutions of 1. The films were deposited at substrate temperatures of between 500 and 600 C and, under optimum growth conditions, were shown by Auger electron spectroscopy to be pure magnesium oxide with no detectable carbon.

Synthesis and thermal decomposition studies of homo- and heteroleptic tin(iv) thiolates and dithiocarbamates: molecular precursors for tin sulfides

“…In contrast, mixed alkoxide/ β-diketonates, which are the analogous monodentate/bidentate hybrid oxygenated precursors for the deposition of metal oxides, have been widely exploited. 29 The crystal structure of 4 is shown in Fig. 2, along with selected bond lengths and angles.…”

“…(R 2 NCS 2 ) n (RS) 4Ϫn Sn as possible precursors, as well as being interesting synthetic and structural targets in their own right. From the CVD perspective, the use of hybrid alkoxide/β-diketonates is widespread 29 but an analogous strategy for heavier Group 16-containing materials has not, to our knowledge, been considered previously.…”

Dialkylcarbamato magnesium cluster complexes: precursors to the single-source chemical vapour deposition of high quality MgO thin films

“…14 Moreover, there is no evidence that this precursor gives any crystallinity in deposited films. Davies et al 15 have synthesised the mixed ligand alkoxide/bdiketonate complex [Mg(thd)(OMe)(MeOH)] 4 4 in good yield. The vapours of this precursor were introduced to the deposition chamber by a liquid phase injection technique 16 as opposed to conventional sublimation, yielding, at a deposition temperature of 550 uC, crystallites of a (100) preferred orientation.…”

In search of molecular precursors for cadmium sulfide—new complexes with a sulfur-rich kernel: cadmium(ii) tri-tert-butoxysilanethiolates with additional diethyldithiocarbamato ligand

“…None of the above examples were considered as possible CVD sulfide precursors, although the use of somewhat similar mixed alkoxide/b-diketonate complexes is widespread. 24, 25 Barone et al 26 were the first who prepared mixed monometallic tin(IV) complexes [Sn(S 2 CNEt 2 ) 2 (SR) 2 ] (where R = c-Hex, Ph and CH 2 CF 3 ) either by oxidative addition of tetraethyldithiuram disulfide to a thiolate generated in situ or ligand redistribution between thiolate (RS) 4 Sn and dithiocarbamate (Et 2 NCS 2 ) 4 Sn. They not only tried these neutral heteroleptic species as a new type of tin sulfide CVD precursors but considered them as interesting synthetic and structural targets on their own right.…”