Synthesis, characterization and CMP property of neat and doped mesoporous ceria as defective active particle abrasives

Chen, Yang; Li, Pingyang; Wang, Chao; Zhong, Luning; Chen, Ailian

doi:10.1016/j.surfin.2024.105614

Surfaces and Interfaces

2025

DOI: 10.1016/j.surfin.2024.105614

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Synthesis, characterization and CMP property of neat and doped mesoporous ceria as defective active particle abrasives

Yang Chen,

Pingyang Li,

Chao Wang

et al.

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Synthesis, characterization and CMP property of neat and doped mesoporous ceria as defective active particle abrasives

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References 77 publications

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