2023
DOI: 10.4028/p-b9q7ct
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Synthesis, Characterization, and Wear Behavior of W-DLC Films Deposited on Si Substrates

Ramazan Karslioglu,
Efstathios I. Meletis

Abstract: Tungsten (W) reinforced diamond-like carbon (DLC) nanocomposite thin films were deposited on silicon substrates by magnetron sputtering in a CH4/Ar discharge. The W content of the films was varied by varying the W target power (20, 40, 60, 80, and 100 W). The evolution of the W-DLC nanocomposites was studied by high-resolution transmission electron microscopy, X-ray energy dispersive spectroscopy, X-ray photoelectron spectroscopy, 3D optical profilometry and Raman spectroscopy. Increasing the W target power re… Show more

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