YBa 2 Cu 3 O x was deformed from 850 to 980 °C in oxygen partial pressures of 10 3 to 10 5 Pa. Steady-state creep rate, e, for P(O 2 ) from 10 4 to 10 5 Pa could be expressed as e = Aa yo (GS)" 28±06 exp -(970 ± 130 kJ/mole)/R7; where A is a constant, a-the steady-state stress, GS the average grain size, and R and T have their usual meanings. For P(O 2 ) from 10 3 to 3 x 10 3 Pa, the activation energy decreased to about 650 kJ/mole and for a given temperature creep kinetics were much faster. The data and microscopic observations indicated that creep occurred by diffusional flow. Comparisons with diffusion data for YBa 2 Cu 3 O;E suggested that Y or Ba may be rate-controlling diffusing species.