“…Titanium dioxide is also a principal component used in planar waveguide technology [14,15]. Several synthesis methods concerning titanium dioxide thin films are described in the literature, such as e-beam evaporation [2], magnetron sputtering [7,16], ultrasonic spray pyrolysis [17], chemical vapor deposition [18,19], metal organic chemical vapor deposition [13], pulsed laser deposition [20], and sol-gel method [1, 5,6,[9][10][11][12][13]. The sol-gel method has advantages, due to low temperature processing, easy coating of large area, and being suitable for preparation of porous films and homogeneous multicomponent oxide films.…”