2022
DOI: 10.1063/5.0090398
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Target erosion process during broad ion beam sputtering using 3D modeling of ion trajectories

Abstract: Understanding the distribution of particles sputtered from a target requires an appreciation of how ions impinge on the target. In pursuit of this goal, a fully three-dimensional model of the ion trajectories in a broad ion beam, assuming full space charge compensation, Gaussian emission characteristics of the beamlets, and beamlet deflection, was constructed. The modeled ion trajectories were used to simulate target erosion, enabling a comparison between the modeled erosion and the experimental erosion. The f… Show more

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