Abstract:Understanding the distribution of particles sputtered from a target requires an appreciation of how ions impinge on the target. In pursuit of this goal, a fully three-dimensional model of the ion trajectories in a broad ion beam, assuming full space charge compensation, Gaussian emission characteristics of the beamlets, and beamlet deflection, was constructed. The modeled ion trajectories were used to simulate target erosion, enabling a comparison between the modeled erosion and the experimental erosion. The f… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.