2017
DOI: 10.1088/1361-6501/aa6182
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Technological advances in measurements and intelligent instrumentation

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“…Machine accuracy measurement: Advancements in measurement and simulation techniques have propelled micro-measurement accuracy to a remarkable nano-scale level. This progress includes using sophisticated tools such as 3D fiber probes for radial probing and implementing non-contact autofocus measurement systems [ 35 ]. These cutting-edge methods enhance precision in measurement and extend the capabilities of micro-level accuracy, opening new possibilities for applications in various scientific and industrial domains.…”
Section: Reviewmentioning
confidence: 99%
“…Machine accuracy measurement: Advancements in measurement and simulation techniques have propelled micro-measurement accuracy to a remarkable nano-scale level. This progress includes using sophisticated tools such as 3D fiber probes for radial probing and implementing non-contact autofocus measurement systems [ 35 ]. These cutting-edge methods enhance precision in measurement and extend the capabilities of micro-level accuracy, opening new possibilities for applications in various scientific and industrial domains.…”
Section: Reviewmentioning
confidence: 99%