Technologies for the Development of Polymeric Sensors

Andò, B.; Baglio, S.; Castorina, Salvatore; Graziani, S.; Trigona, Carlo

doi:10.1007/978-3-031-08136-1_50

Cited by 1 publication

(1 citation statement)

References 36 publications

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“…In light of these properties, SU-8 has been already used in many studies to fabricate accelerometers [42][43][44]. Furthermore, polymeric accelerometers are characterized, in general, by high sensitivities [45,46] and ease of manufacturing [47]. Finally, the use of SU-8 offers the possibility to contain costs as compared to other jettable materials, like metallic nanoparticle suspensions.…”

Section: Introductionmentioning

confidence: 99%

Printing MEMS: Application of Inkjet Techniques to the Manufacturing of Inertial Accelerometers

Bernasconi,

Invernizzi,

Gallo Stampino

et al. 2023

Micromachines

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In the last few years, the manufacturing of microelectromechanical systems (MEMS) by means of innovative tridimensional and bidimensional printing technologies has significantly catalyzed the attention of researchers. Inkjet material deposition, in particular, can become a key enabling technology for the production of polymer-based inertial sensors characterized by low cost, high manufacturing scalability and superior sensitivity. In this paper, a fully inkjet-printed polymeric accelerometer is proposed, and its manufacturing steps are described. The manufacturing challenges connected with the inkjet deposition of SU-8 as a structural material are identified and addressed, resulting in the production of a functional spring-mass sensor. A step-crosslinking process allows optimization of the final shape of the device and limits defects typical of inkjet printing. The resulting device is characterized from a morphological point of view, and its functionality is assessed in performing optical readout. The acceleration range of the optimized device is 0–0.7 g, its resolution is 2 × 10−3 g and its sensitivity is 6745 nm/g. In general, the work demonstrates the feasibility of polymeric accelerometer production via inkjet printing, and these characteristic parameters demonstrate their potential applicability in a broad range of uses requiring highly accurate acceleration measurements over small displacements.

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