Technology and Application Opportunities for SiC-FET Gas Sensors

Spetz, Anita Lloyd; Andersson, Mike

doi:10.1007/5346_2011_5

Cited by 8 publications

(4 citation statements)

References 73 publications

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“…More detailed information about the growth parameters, sensor fabrication, and the gas mixing system can be found in our previous works [10,12]. Gas measurements were performed with different gas mixing systems at Linköping University (LiU) [16] and Saarland University (UdS) [17,18]. Both laboratories use gas bottles with a purity of 6.0, and the gas mixing systems are calibrated on flow rather than concentration by using calibrated mass flow controllers (MFCs).…”

Section: Methodsmentioning

confidence: 99%

Metal Oxide Nanolayer-Decorated Epitaxial Graphene: A Gas Sensor Study

et al. 2020

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In this manuscript, we explore the sensor properties of epitaxially grown graphene on silicon carbide decorated with nanolayers of CuO, Fe3O4, V2O5, or ZrO2. The sensor devices were investigated in regard to their response towards NH3 as a typical reducing gas and CO, C6H6, CH2O, and NO2 as gases of interest for air quality monitoring. Moreover, the impact of operating temperature, relative humidity, and additional UV irradiation as changes in the sensing environment have been explored towards their impact on sensing properties. Finally, a cross-laboratory study is presented, supporting stable sensor responses, and the final data is merged into a simplified sensor array. This study shows that sensors can be tailored not only by using different materials but also by applying different working conditions, according to the requirements of certain applications. Lastly, a combination of several different sensors into a sensor array leads to a well-performing sensor system that, with further development, could be suitable for several applications where there is no solution on the market today.

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Section: Methodsmentioning

confidence: 99%

Metal Oxide Nanolayer-Decorated Epitaxial Graphene: A Gas Sensor Study

et al. 2020

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“…Besides processing-related constraints in relation to a reduction in gate length, the transistor characteristics will also be altered in a manner which would counteract the increase in transistor gain when the channel length is made progressively shorter (for a more elaborate treatment of this subject, see the section about short-channel devices in [197]). Further treatments in relation to the application of field effect transistors as transducers in gas sensors can be found in [199][200][201][202].…”

Section: Transduction Mechanismsmentioning

confidence: 99%

Materials Design for the Improvement of SiC Field Effect Gas Sensor performance in High Temperature Process Control applications

Khajavizadeh

2023

Linköping Studies in Science and Technology. Dissertations

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“…Pellistor-type sensors only detect the heat generated by combustion of gas components on their catalytically active surface [21,22]. Gas-sensitive field-effect transistors (GasFETs) detect charges on or in the gate material which influence the current flowing through the transistor channel [23,24]. Even electrochemical (EC) cells depending on ionization of gas molecules at a catalytically active electrode and providing a current signal caused by the ion conductance in an electrolyte show a response to various gases.…”

Section: Introductionmentioning

confidence: 99%

Sensor Arrays, Virtual Multisensors, Data Fusion, and Gas Sensor Data Evaluation

Reimann

Schütze

2013

Springer Series on Chemical Sensors and Biosensors

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Selectivity will remain one of the main challenges for gas sensors. The majority of single gas sensors have a broad response spectrum and additional effort is required to provide specific information from the recorded raw data. Sensor arrays comprising a number of different sensors, either of the same basic type or combining different sensor principles, are often employed to improve the selectivity. Another approach is the dynamic operation of a single sensor element leading to a virtual multisensor. Depending on the application, both classification, i.e., recognition of a certain gas or gas mixture, and quantification, i.e., determining the concentration of a target gas, are required. For evaluation of the higher-dimensional data vectors obtained from the sensor system, different methods are commonly used, e.g., unsupervised and supervised multivariate statistics or artificial neural networks. For comprehensive classification, a multistep process is employed, typically comprising data preprocessing, feature extraction, dimensionality reduction, and finally classification. This chapter addresses typical methods used for gas sensor data evaluation and also briefly addresses challenges relating to sensor calibration and drift compensation. Four application examples are shown in detail demonstrating the use of different sensor configurations and data processing approaches: robust ozone quantification, sweat odor assessment trained by correlation with a human sensory panel, fire detection in buildings, and finally underground fire detection in coal mines requiring very high selectivity.

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Technology and Application Opportunities for SiC-FET Gas Sensors

Cited by 8 publications

References 73 publications

Metal Oxide Nanolayer-Decorated Epitaxial Graphene: A Gas Sensor Study

Metal Oxide Nanolayer-Decorated Epitaxial Graphene: A Gas Sensor Study

Materials Design for the Improvement of SiC Field Effect Gas Sensor performance in High Temperature Process Control applications

Sensor Arrays, Virtual Multisensors, Data Fusion, and Gas Sensor Data Evaluation

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