Temperature-dependent activation energy for silicon desorption processes

Лебедев, В. И.; Mizina, V. V.; Благина, Л В; Barannik, A. A.

doi:10.1134/s0020168508050026

Inorg Mater

2008

DOI: 10.1134/s0020168508050026

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Temperature-dependent activation energy for silicon desorption processes

В. И. Лебедев

V. V. Mizina

Л В Благина

et al.

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Temperature-dependent activation energy for silicon desorption processes

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