2009
DOI: 10.1021/cm900753f
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Template Infiltration Routes to Ordered Macroporous TiN and SiNx Films

Abstract: Ordered macroporous films of nanocrystalline TiN and amorphous SiN x on silica substrates have been prepared. This involved infiltration of sacrificial templates of close-packed polystyrene microsphere arrays with precursor materials, followed by pyrolysis under ammonia to remove the template and form the ceramic materials. TiN was prepared from a sol-gel route, whereas SiN x was introduced using a Si(NHMe) 4 precursor solution. Hexane was found to be the solvent most compatible with the divinylbenzene-cross-l… Show more

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Cited by 24 publications
(29 citation statements)
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“…The amorphous Ti 3 N 4 structure was studied using X-ray absorption and EXAFS techniques that showed the local atomic configurations were based on the TiN rocksalt (Fm-3m) structure, but with 40-50% vacancies on the cation and anion sites [85]. Similar products are obtained when titanium dialkylamides are reacted with primary amines then pyrolysed under ammonia [87,88]. Reactions of Zr 4+ and Hf 4+ amides with ammonia did produce well defined M 3 N 4 phases, though these were poorly crystalline [89], and could contain nanoparticles embedded in an amorphous matrix as found for Ti 3 N 4 .…”
Section: Ambient and Low Pressure Synthesis Approachesmentioning
confidence: 98%
“…The amorphous Ti 3 N 4 structure was studied using X-ray absorption and EXAFS techniques that showed the local atomic configurations were based on the TiN rocksalt (Fm-3m) structure, but with 40-50% vacancies on the cation and anion sites [85]. Similar products are obtained when titanium dialkylamides are reacted with primary amines then pyrolysed under ammonia [87,88]. Reactions of Zr 4+ and Hf 4+ amides with ammonia did produce well defined M 3 N 4 phases, though these were poorly crystalline [89], and could contain nanoparticles embedded in an amorphous matrix as found for Ti 3 N 4 .…”
Section: Ambient and Low Pressure Synthesis Approachesmentioning
confidence: 98%
“…Very recently the synthesis of ordered macroporous films (inverse opals) of nanocrystalline TiN has also been described using this deposition chemistry [29]. The sol was infiltrated into close-packed polystyrene microsphere arrays, followed by pyrolysis under ammonia to remove the template.…”
Section: Porous Metal Nitridesmentioning
confidence: 99%
“…A lot of macroporous materials including inorganic, organic, metallic, polymeric, and ceramic have been successfully made using this method [19][20][21][22]. Both organic and inorganic macroporous materials are very interesting for theoretical research and practical applications such as making optical filters, switches, chemical sensors, electrochemical cells, and bio-separation devices, and as carriers for catalysts and medicines [23][24][25][26].…”
Section: Introductionmentioning
confidence: 99%