The ferroelectric soft mode in polycrystalline pristine SrTiO3 and weakly doped SrTiO3 : M (M = 2 at% Fe, Ni, Mn, Co) thin films on (001) MgO substrates has been studied using time-domain terahertz spectroscopy. Spectra of real and imaginary parts of film permittivity were determined in the frequency range of 5–100 cm–1 at temperatures between 5 and 300 K. Central frequency and dielectric contribution of the ferroelectric soft mode show Barrett-like temperature dependencies similar to crystalline SrTiO3. Large negative values of Curie temperature and enhanced positive values of Barrett quantum temperatures are discovered indicating that doped SrTiO3 thin films are farther from ferroelectric phase transition than SrTiO3 crystals.