Test of off-axis aspheric surfaces with CGH

Fa-zhi, 黎发志 Li; Xiao, 罗霄 Luo; Jing-li, 赵晶丽 Zhao; Dong-lin, 薛栋林 Xue; Ligong, 郑立功 Zheng; Xue-jun, 张学军 Zhang

doi:10.3788/ope.20111904.0709

Cited by 8 publications

(2 citation statements)

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“…To measure the shape error of the off-axis aspheric surface at a high accuracy, researchers have offered several useful methods [3][4][5][6][7][8][9][10][11][12][13]. Wang Xiao-kun tested an off-axis ellipsoid mirror with sub-aperture stitching interferometry and applied least-squares fitting to process the test data, resulting in a 1.275λ of PV and 0.113λ of RMS [4].…”

Section: Introductionmentioning

confidence: 99%

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The Methods and Experiments of Shape Measurement for Off-Axis Conic Aspheric Surface

Zhang

Liu

et al. 2020

Materials

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The off-axis conic aspheric surface is widely used as a component in modern optical systems. It is critical for this kind of surface to obtain the real accuracy of the shape during optical processing. As is widely known, the null test is an effective method to measure the shape accuracy with high precision. Therefore, three shape measurement methods of null test including auto-collimation, single computer-generated hologram (CGH), and hybrid compensation are presented in detail in this research. Although the various methods have their own advantages and disadvantages, all methods need a special auxiliary component to accomplish the measurement. In the paper, an off-axis paraboloid (OAP) was chosen to be measured using the three methods along with auxiliary components of their own and it was shown that the experimental results involved in peak-to-valley (PV), root-mean-square (RMS), and shape distribution from three methods were consistent. As a result, the correctness and effectiveness of these three measurement methods were confirmed, which are very useful in engineering.

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Section: Introductionmentioning

confidence: 99%

“…M. M. Talha measured a freeform surface with the CGH method with a result of PV = 0.0479λ [12]. Similarly, Li Fa-zhi used CGH as the aiding element to measure an off-axis high order aspheric surface [13].…”

Section: Introductionmentioning

confidence: 99%

The Methods and Experiments of Shape Measurement for Off-Axis Conic Aspheric Surface

Zhang

Liu

et al. 2020

Materials

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On the technologies of Hα imaging spectrograph for the CHASE mission

Liu

Tao

Chen

et al. 2022

Sci. China Phys. Mech. Astron.

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Versatile bilayer resist for laser lithography at 405 nm on glass substrates

Wang

Griesmann

2013

Opt. Eng

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Abstract. We describe a simple bilayer photoresist that is particularly well suited for laser lithography at an exposure wavelength of 405 nm on glass substrates, which are often used for the fabrication of binary diffractive optics and computer-generated holograms. The resist consists of a poly-dimethyl glutarimide (PMGI) bottom layer that is used as an antireflection coating between a glass substrate and a positive or negative photoresist. The optical properties of the PMGI layer at 405 nm result in excellent suppression of reflections into the photoresist and good process latitude.

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Test of off-axis aspheric surfaces with CGH

Cited by 8 publications

References 0 publications

The Methods and Experiments of Shape Measurement for Off-Axis Conic Aspheric Surface

The Methods and Experiments of Shape Measurement for Off-Axis Conic Aspheric Surface

On the technologies of Hα imaging spectrograph for the CHASE mission

Versatile bilayer resist for laser lithography at 405 nm on glass substrates

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