Texture Characterization Including Warm/Cool Sensation using Force-, Light-, and Temperature-Sensitive Microelectromechanical Systems Sensor
Abstract:In this paper, we report on texture measurements for an object, including tactile, warm/cool, and light sensations using a multimodal micro-electromechanical systems (MEMS) sensor. This MEMS sensor can detect force as a resistance change of the strain gauge on a microcantilever and light as an impedance change of a Si layer by a photoconductive effect. The sensor, which was maintained near human body temperature using a heater, can also detect a temperature drop after heat transfer from the sensor to a contact… Show more
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