The analysis of optical lithography at 2-dimensional dense structure

Park, Chan-Ha; Eom, Tae-Seung; Shin, Hyung Shik; Yang, Kiho; Choi, Jin‐Young; Kim, Hyeongsoo; Yim, Donggyu; Kim, Jinwoong

doi:10.1117/12.772446

Optical Microlithography XXI 2008

DOI: 10.1117/12.772446

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The analysis of optical lithography at 2-dimensional dense structure

Chan-Ha Park¹,

Tae-Seung Eom²,

Hyung Shik Shin³

et al.

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The analysis of optical lithography at 2-dimensional dense structure

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