The Comparative Study of Semiconductor Structures Using Simultaneous Detection of Photoacoustic Signal and Photovoltage

AC Photovoltaic Detection of Buried Structures of Semiconductor Wafers

“…At the same time, additional illumination (DC-biased light) caused the nonlinear dependence of the piezoelectric photoacoustic (PA) signal on the modulated light intensity [6][7]. The same behaviour appeared in photoelectron spectroscopy (PES) measurements [8][9].…”

“…All these phenomena may be owed to the PV and Spy effects from the additional light incidence [4][5][6][7][8][9]. To the best of the author's knowledge, up to now, there is no author to pay attention to the effect of additional illumination on the AC PV signal, which may give some hints to explain the problems above.…”