Nanocrystalline ceria thin films of yellowish color have been photo-assisted anodic deposited in the electroplating solution containing various volume ratio of ethanol (0, 10, 40, 70 and 100%) onto 316 L surface, and the influence of ethanol content on the formation of ceria films were studied with scanning electron microscopy, ellipsometry, X-ray diffraction, transmission electron microscopy, Raman and X-ray photoelectron spectroscopy. Results show that both the film thickness and particle size of ceria layers increase whereas both the film porosity and Ce(III) content decrease with the augment of ethanol content from 0 to 70%; The important role of ethanol content in enhancing the anodic deposition rate of ceria film may be mostly achieved by the simultaneously photo generated electrons (e − cb ).