The discharge mode transition and O(<sup>5</sup>p<sub>1</sub>) production mechanism of pulsed radio frequency capacitively coupled plasma

Liu, X. Y.; Hu, J. T.; Liu, J. H.; Xiong, Zilan; Liu, D. W.; Lü, Xing; Shi, Jianjun

doi:10.1063/1.4733662

Cited by 24 publications

(14 citation statements)

References 28 publications

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“…The high energy electrons are mainly generated in the strong electric field (maximum 4 kV/mm) inside the sheath (Figure. 9(a) and (f)), while the dominant electron power absorbance in the bulk area is through Ohmic heating [71] . In this study, the electron power absorbance (Figure.…”

Section: Lf Vs Dfmentioning

confidence: 99%

Numerical simulation of atmospheric-pressure 200 kHz/13.56 MHz dual-frequency dielectric barrier discharges

Liu

Veer

Peeters

et al. 2018

Plasma Sources Sci. Technol.

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A one-dimensional drift-diffusion model is used to study atmospheric-pressure dual frequency (DF) dielectric barrier discharges in argon using the plasma modelling platform PLASIMO. The simulation exhibits an excellent agreement with the experimental results and gives insight into the DF plasma dynamics e.g. the electric field, the sheath edge profiles, the ionization/excitation rate and the electron energy distribution function (EEDF) profiles. The results indicate that due to the RF oscillation, the electric field, the sheath edge and thus the ionization/excitation are temporally modulated. As a result, the plasma conductivity is enhanced as the plasma density is higher. The discharge development is slowed down with a lower current amplitude and a longer duration. The time-averaged sheath is getting thinner with a more pronounced ionization rate and a longer contacting time near the substrate, which could help to improve the efficiency of plasma-assisted surface processing. In addition, the DF excitation exhibits a capability of modifying the EEDF profiles and controlling the plasma chemical kinetics, which can be applied to the other relevant fields e.g. gas phase chemical conversion.

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Section: Lf Vs Dfmentioning

confidence: 99%

Numerical simulation of atmospheric-pressure 200 kHz/13.56 MHz dual-frequency dielectric barrier discharges

Liu

Veer

Peeters

et al. 2018

Plasma Sources Sci. Technol.

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show abstract

“…In biomedical and chemical applications, pulsed-power discharges have been actively studied because they exhibit superior discharge characteristics such as better plume length, low power consumption, and low gas temperature. 16,17 Thus, pulsed-power rf plasmas are ideal for treating biological materials that are easily damaged by high temperatures.…”

Section: Introductionmentioning

confidence: 99%

Abnormal electron-heating mode and formation of secondary-energetic electrons in pulsed microwave-frequency atmospheric microplasmas

et al. 2014

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The formation of secondary energetic electrons induced by an abnormal electron-heating mode in pulsed microwave-frequency atmospheric microplasmas was investigated using particle-in-cell simulation. We found that additional high electron heating only occurs during the first period of the ignition phase after the start of a second pulse at sub-millimeter dimensions. During this period, the electrons are unable to follow the abruptly retreating sheath through diffusion alone. Thus, a selfconsistent electric field is induced to drive the electrons toward the electrode. These behaviors result in an abnormal electron-heating mode that produces high-energy electrons at the electrode with energies greater than 50 eV. V C 2014 AIP Publishing LLC. [http://dx.

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“…A 2D numerical model is used to the study the distribution of ions within 1 m from the wire electrode. The model used in this study extends the existing models (He et al, 2013;Liu et al, 2012Liu et al, , 2014a to model the relevant phenomena at the relevant scales. The model solves the Poisson's equation and the transport equations for neutral and charged species as a function of time.…”

Section: Ion Transport Modelmentioning

confidence: 99%

Large-scale ion generation for precipitation of atmospheric aerosols

et al. 2020

Atmos. Chem. Phys.

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Abstract. Artificial rain is explored as a remedy for climate change caused farmland drought and bushfires. Increasing the ion density in the open air is an efficient way to generate charged nuclei from atmospheric aerosols and induce precipitation or eliminate fog. Here we report on the development of a large commercial-installation-scale atmospheric ion generator based on corona plasma discharges, experimental monitoring, and numerical modeling of the parameters and range of the atmospheric ions, as well as the application of the generated ions to produce charged aerosols and induce precipitation at the scale of a large cloud chamber. The coverage area of the ions generated by the large corona discharge installation with the 7.2 km long wire electrode and applied voltage of −90 kV is studied under prevailing weather conditions including wind direction and speed. By synergizing over 300 000 localized corona discharge points, we demonstrate a substantial decrease in the decay of ions compared to a single corona discharge point in the open air, leading to large-scale (30 m ×23 m ×90 m) ion coverage. Once aerosols combine with the generated ions, charged nuclei are produced. Higher wind speed has led to larger areas covered by the plasma-generated ions. The cloud chamber experiments (relative humidity 130±10 %) suggest that charged aerosols generated by ions with a density of ∼104 cm−3 can accelerate the settlement of moisture by 38 %. These results are promising for the development of large-scale installations for the effective localized control of atmospheric phenomena.

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The discharge mode transition and O(⁵p₁) production mechanism of pulsed radio frequency capacitively coupled plasma

Cited by 24 publications

References 28 publications

Numerical simulation of atmospheric-pressure 200 kHz/13.56 MHz dual-frequency dielectric barrier discharges

Numerical simulation of atmospheric-pressure 200 kHz/13.56 MHz dual-frequency dielectric barrier discharges

Abnormal electron-heating mode and formation of secondary-energetic electrons in pulsed microwave-frequency atmospheric microplasmas

Large-scale ion generation for precipitation of atmospheric aerosols

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The discharge mode transition and O(5p1) production mechanism of pulsed radio frequency capacitively coupled plasma

Cited by 24 publications

References 28 publications

Numerical simulation of atmospheric-pressure 200 kHz/13.56 MHz dual-frequency dielectric barrier discharges

Numerical simulation of atmospheric-pressure 200 kHz/13.56 MHz dual-frequency dielectric barrier discharges

Abnormal electron-heating mode and formation of secondary-energetic electrons in pulsed microwave-frequency atmospheric microplasmas

Large-scale ion generation for precipitation of atmospheric aerosols

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The discharge mode transition and O(⁵p₁) production mechanism of pulsed radio frequency capacitively coupled plasma