The dynamic model of electrostatic torsion mirror with pull-in consideration for multiphysics behavior anticipation

Abstract

This study presents a newly developed dynamic model established by MATLAB Simulink that can handle post pull-in behavior of MEMS electrostatic torsional mirror. In addition to the conventional MATLAB Simulink model of the quadratic oscillation system, a mathematical model of displacement limiter has been inserted to represent the pull-in effect in dynamic analysis. Due to the modification, the model has become applicable to both pre-and post pull-in region of electrostatic actuators. Electrical circuits from the MAT-LAB Simulink libarary can be combined with the mechanical model and simulated to see multiphysics behavior. The new model has been integrated in the simulation model of self-oscillating MEMS system which has CMOS logics, and the versatility in the behaviorlevel simulation has been verified.