2020
DOI: 10.1088/1757-899x/982/1/012064
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The effect of deposition time on the properties of titanium dioxide thin film prepared using CVD

Abstract: This research aimed to investigate effect of deposition time on the structural, morphological properties and optical properties of the titanium dioxide (TiO2) thin film prepared using Chemical Vapour Deposition (CVD). This research involved two processes which are samples preparation process and characterisation process to fulfil the aim. The samples preparation process was done by synthesising TiO2 on indium thin oxide (ITO) substrates heated at 60 °C substrate temperature. Titanium butoxide used as the precu… Show more

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