2022
DOI: 10.35378/gujs.822954
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The Effect of Si (111) Substrate Surface Cleaning on Growth Rate and Crystal Quality of MOVPE Grown AlN

Abstract: Highlights• This paper focuses on the importance of the RCA cleaning process.• Effect of the RCA cleaning process is proposed for on growth rate of AlN layer in the study.• The RCA cleaning process increases the growth rate and improves the crystal quality were obtained.

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Cited by 8 publications
(1 citation statement)
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“…Similarly, different levels of soiling of spores and bacterial cells on different surfaces used in food processing equipment and kitchenware have been reported by several authors (Dhowlaghar et al, 2018; Shineh et al, 2023; Zheng et al, 2021). Substratum types have also been seen to impact cleaning efficiency (Faille et al, 2002; Papa et al, 2023; Perkitel et al, 2022). Some reports suggest that the physicochemistry and topography of the surface could impact the adhesion, while others report no impact of surface physicochemistry on the bacteria attachment (Dhowlaghar et al, 2018; Hamadi et al, 2014; Liu et al, 2023).…”
Section: Introductionmentioning
confidence: 99%
“…Similarly, different levels of soiling of spores and bacterial cells on different surfaces used in food processing equipment and kitchenware have been reported by several authors (Dhowlaghar et al, 2018; Shineh et al, 2023; Zheng et al, 2021). Substratum types have also been seen to impact cleaning efficiency (Faille et al, 2002; Papa et al, 2023; Perkitel et al, 2022). Some reports suggest that the physicochemistry and topography of the surface could impact the adhesion, while others report no impact of surface physicochemistry on the bacteria attachment (Dhowlaghar et al, 2018; Hamadi et al, 2014; Liu et al, 2023).…”
Section: Introductionmentioning
confidence: 99%