The Efficiency of Optical Microstructures Formed on Molybdenum Films

Abstract

Abstract.We have considered influence of technological errors of formation of the amplitude optical lattices made by method of a laser ablyation of thin films of molybdenum on distribution of diffraction orders in a distant zone of diffraction. For this purpose we have digitized a profile of a site of the created diffraction structure with the subsequent transformation to amplitude or phase functions of a transmission.Keywords: diffractive microrelief, metallic mask, laser ablation, thermochemical recording, film molybdenum, reactive ion etching.Citation: Poletaev SD, Volotovsky SG. The efficiency of optical microstructures formed on molybdenum films.