2007 Conference on Lasers and Electro-Optics (CLEO) 2007
DOI: 10.1109/cleo.2007.4453530
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The Fabrication of Laser Array by Holographic Interference Lithography

Chu-Li Chao
1
,
Chao Ni
2
,
Rong Xuan
3
et al.

Abstract: We have developed a novel method to produce different grating periods in one chip and applied this in the fabrication for laser array. The result shows accurate controllability of lasing wavelength and low threshold currents.

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