The influence of lateral interactions on surface pyrolysis of silicon hydrides

Abstract

In this paper features of disintegration of silicon hydrides on Si(100) surface are considered. The simulation of hydrogen TPD-spectra has shown that there are three ways for hydrogen desorbtion and that disintegration of molecules SiH 2 proceeds through bimolecular reactions only. The comparison of calculations and experiments allowed to estimate kinetic constants of elementary reactions of pyrolysis.