The Influence of Pressure on the TCF of AlN-Based SAW Pressure Sensor

Pan, Shuliang; Memon, Maria Muzamil; Wan, Jiang; Wang, Tao; Zhang, Wanli

doi:10.1109/jsen.2022.3140412

Cited by 10 publications

(4 citation statements)

References 37 publications

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“…SAW pressure sensors have been extensively investigated across numerous applications. Traditionally, these sensors have employed materials such as AlN [22,23], quartz [24,25], Langasite [26], and LiNbO 3 [27]. Despite their lack of flexibility, these materials have found utility due to their exceptional stability in harsh environments [22,23,[26][27][28][29][30][31][32] and as resonators [25,27,[33][34][35][36][37].…”

Section: Surface Acoustic Wave Pressure Sensorsmentioning

confidence: 99%

“…Traditionally, these sensors have employed materials such as AlN [22,23], quartz [24,25], Langasite [26], and LiNbO 3 [27]. Despite their lack of flexibility, these materials have found utility due to their exceptional stability in harsh environments [22,23,[26][27][28][29][30][31][32] and as resonators [25,27,[33][34][35][36][37]. Various factors are considered in the design of SAW pressure sensors, including resistance to liquid exposure [37,38], resilience to residual stress [29,39], gas detection capabilities [30,31,40], and the impact of circumferential stresses including sensitivity to humidity [41,42].…”

Section: Surface Acoustic Wave Pressure Sensorsmentioning

confidence: 99%

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Frequency shift of a PVDF surface acoustic wave sensor on a curved surface

Masoud,

Aslam,

et al. 2024

Smart Mater. Struct.

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Wearable sensors have generated a significant attention across various research domains, including the monitoring of human health, pressure sensing, and body health monitoring.Notably, substantial research has been focused on the utilization of piezoelectric sensors for precise pressure measurements in diverse applications, such as medical devices and structural health monitoring. This paper explains the external pressure measurement employing sensors crafted from Polyvinylidene Fluoride (PVDF), known for its remarkable ability to conform consistently to various surface shapes and curvatures. The primary objective of this study is to present an integrated experimental and numerical approach to quantifying the frequency shift of piezoelectric PVDF SAW sensors when deployed on curved surfaces, a crucial step in optimizing their performance for real-world applications. We aim to explain how changes in surface geometry impact frequency shifts concerning external pressure and movement. Our findings reveal a linear relationship between frequency shifts and geometric variations in a certain range, as supported by experimental data. Furthermore, it is observed that PVDF samples can be used to successfully measure the internal pressure of a canister. The consistency between experimental and numerical results underscores the validity and reliability of our approach. In summary, this paper contributes to our understanding of piezoelectric PVDF SAW sensor behavior when placed on curved surfaces. Our novel methodology combines experimental measurements and numerical simulations to quantify the impact of geometric changes on frequency shifts, providing valuable insights for future sensor applications.

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Section: Surface Acoustic Wave Pressure Sensorsmentioning

confidence: 99%

Section: Surface Acoustic Wave Pressure Sensorsmentioning

confidence: 99%

Frequency shift of a PVDF surface acoustic wave sensor on a curved surface

Masoud,

Aslam,

et al. 2024

Smart Mater. Struct.

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“…Among different types of acoustic wave devices, Surface acoustic wave (SAW) devices have captured wide attention owing to their simple detection mechanism, easy integration, high sensitivity, good stability, small size, low cost, high accuracy, planar structure, and capability to operate in wireless mode [19][20][21]. These features make the SAW devices appropriate for detecting various physical parameters such as pressure, temperature, gas, vapors, humidity, and motion [22][23][24][25][26]. The principle of humidity sensing is realized by covering the SAW device configured as a delay line or resonator with a sensing film, as shown in Figure 2.…”

Section: Resistivementioning

confidence: 99%

Surface Acoustic Wave Humidity Sensor: A Review

et al. 2023

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The Growing demands for humidity detection in commercial and industrial applications led to the rapid development of humidity sensors based on different techniques. Surface acoustic wave (SAW) technology is one of these methods that has been found to provide a powerful platform for humidity sensing owing to its intrinsic features, including small size, high sensitivity, and simple operational mechanism. Similar to other techniques, the principle of humidity sensing in SAW devices is also realized by an overlaid sensitive film, which serves as the core element whose interaction with water molecules is responsible for overall performance. Therefore, most researchers are focused on exploring different sensing materials to achieve optimum performance characteristics. This article reviews sensing materials used to develop SAW humidity sensors and their responses based on theoretical aspects and experimental outcomes. Herein the influence of overlaid sensing film on the performance parameters of the SAW device, such as quality factor, signal amplitude, insertion loss, etc., is also highlighted. Lastly, a recommendation to minimize the significant change in device characteristics is presented, which we believe will be a good step for the future development of SAW humidity sensors.

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“…In extreme temperature environments such as aerospace, automotive engines, oil exploration filed etc, * Author to whom any correspondence should be addressed. temperature shift and thermal hysteresis occur which greatly affect the measurement accuracy of the sensor [10][11][12][13][14][15]. Therefore, it is critical to ensure the continuous and stable output of the pressure sensor in harsh environments.…”

Section: Introductionmentioning

confidence: 99%

Research on high temperature performance of pressure sensor

Zhao¹,

Pan²,

Memon³

et al. 2023

J. Micromech. Microeng.

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This work proposes a molybdenum (Mo) based pressure sensor capable of operating at temperatures higher than 300 ℃. The sensor utilizes a 30 μm thick rectangular pressure-sensitive film and 2 μm thick gate Mo resistors to form a Wheatstone bridge structure to enhance pressure sensing. Finite element analysis (FEA) has been performed to design the sensor and analyze the pressure and temperature effect. The developed sensor with the excitation of 1 V voltage exhibits excellent performance characteristics at room temperature (25 ℃), including a sensitivity of 0.05689 mV/V/kPa, 0.15 % Full Scale (FS) accuracy, a nonlinearity of 0.79 % FS, and 0.02 % FS repeatability. The thermal zero shift of -0.13 % FS/℃ is obtained in the 25 ℃ to 300 ℃ temperature range. The simulation findings illustrate that the thermal mismatch weakens the thermal zero shift by +0.012 ‰ FS/℃, while the deviation of the temperature coefficient of resistance (TCR) and initial resistivity (ρ_(T_0 )) aggravate the thermal zero shift by -0.139 % FS/℃. Among both, the deviation of ρ_(T_0 ) and TCR is the major contributor to thermal zero shift. Moreover, it was found that the Seebeck effect caused by the on-chip temperature gradient also affects the accuracy of the sensor. A temperature difference of 5.4 ℃ produces a thermoelectric potential of 37.95 μV equivalent to a pressure of 670 Pa loading on the chip. Besides, the response characteristics of the sensor at different temperature rates were investigated.

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The Influence of Pressure on the TCF of AlN-Based SAW Pressure Sensor

Cited by 10 publications

References 37 publications

Frequency shift of a PVDF surface acoustic wave sensor on a curved surface

Frequency shift of a PVDF surface acoustic wave sensor on a curved surface

Surface Acoustic Wave Humidity Sensor: A Review

Research on high temperature performance of pressure sensor

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