2015 International Symposium on Next-Generation Electronics (ISNE) 2015
DOI: 10.1109/isne.2015.7131983
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The integration process of W-plug landing on Cu line in 28nm-node flash memory and beyond

Yiwen Lu
1
,
Weilin Wang
2
,
Pei-Chia Chen
3
et al.
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