2009
DOI: 10.1117/12.828384
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The Iris AO S163-X, a 489 actuator, 163-piston/tip/tilt-segment MEMS DM

Abstract: Iris AO has been developing microelectromechanical systems (MEMS) based deformable mirrors (DM) for a number of years. This paper presents a review of the basic segmented DM design and shows test results of a 111-actuator, 37-piston/tip/tilt (PTT) segment DM. A 489-actuator 163-PTT-segment design is described as well as progress towards the fabrication of the device. A view to the future is shown by describing path-finding research towards 3000-actuator, 1000-PTT-segment DMs.

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Cited by 2 publications
(2 citation statements)
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“…IrisAO MEMS DMs were manufactured using polysilicon surface micromachining to create actuator platforms and flip-chip bonding bulk-micromachined mirror segments to the actuator platform arrays. Each actuator has three parallel-plate electrodes to enable piston, tip, and tilt mirror segment motions [2,48,49]. An IrisAO MEMS DM was used for the HiCIBaS high altitude balloon payload as described in the technology demonstration section of this paper.…”
Section: Introductionmentioning
confidence: 99%
“…IrisAO MEMS DMs were manufactured using polysilicon surface micromachining to create actuator platforms and flip-chip bonding bulk-micromachined mirror segments to the actuator platform arrays. Each actuator has three parallel-plate electrodes to enable piston, tip, and tilt mirror segment motions [2,48,49]. An IrisAO MEMS DM was used for the HiCIBaS high altitude balloon payload as described in the technology demonstration section of this paper.…”
Section: Introductionmentioning
confidence: 99%
“…The continuous facesheet offers the advantages of a higher fill factor and no diffraction effects, which are always present with segmented facesheets because of their segmented edges. 7,8 Globally, three companies, Boston Micromachines Corporation (BMC), Iris AO and Flexible Optical BV (OKO Technologies), currently provide commercially available MEMS DMs. These companies originated from Boston University, UC Berkeley and TU Delft, respectively.…”
Section: Introductionmentioning
confidence: 99%